SSH EN 62374-1:2010

Semiconductor devices - Part 1: Time-dependent dielectric breakdown (TDDB) test for inter-metal layers

Publication date: May 27, 2011

General information

Current stage: 60.60 Effective date: May 27, 2011

Originator: DPS

Owner: DPS/KT 7

Type: European Norm

ICS: 31.080

Languages: English

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Status: Published

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IEC 62374-1:2010 describes a test method, test structure and lifetime estimation method of the time-dependent dielectric breakdown (TDDB) test for inter-metal layers applied in semiconductor devices.

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PUBLISHED
SSH EN 62374-1:2010
60.60 Standard published
May 27, 2011

SSH EN 62374-1:2010

Semiconductor devices - Part 1: Time-dependent dielectric breakdown (TDDB) test for inter-metal layers

General information

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Scope

Life cycle

NOW

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Adopted from EN 62374-1:2010

Adopted from IEC 62374-1 Ed. 1.0 b