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SSH IEC 62047-30:2017 ED1

Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film

Oct 29, 2021

General information

60.60     Oct 29, 2021

95.99   

DPS

DPS/KT 7

International Standard

31.080.99     31.14     31.140  

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IEC 62047-30:2017(E) specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices. This document applies to piezoelectric thin films fabricated by MEMS process

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SSH IEC 62047-30:2017 ED1
60.60 Standard published
Oct 29, 2021

Related project

Adopted from IEC 62047-30:2017 ED1 IDENTICAL