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SSH IEC 62047-34:2019 ED1

Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer

Oct 29, 2021

General information

60.60     Oct 29, 2021

95.99   

DPS

DPS/KT 7

International Standard

31.080.99     31.14     31.140  

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Scope

IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.

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PUBLISHED
SSH IEC 62047-34:2019 ED1
60.60 Standard published
Oct 29, 2021

Related project

Adopted from IEC 62047-34:2019 ED1 IDENTICAL